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Laser and Particle-Beam Chemical Processing for Microelectronics: Volume 101 (MRS Proceedings) - Softcover

Ehrlich, Daniel J.

 
9781107411043: Laser and Particle-Beam Chemical Processing for Microelectronics: Volume 101 (MRS Proceedings)
Softcover
ISBN 10: 1107411041 ISBN 13: 9781107411043
Publisher: Cambridge University Press, 2014

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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

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  • PublisherCambridge University Press
  • Publication date2014
  • ISBN 10 1107411041
  • ISBN 13 9781107411043
  • BindingPaperback
  • LanguageEnglish
  • Number of pages532

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9780931837692: Laser and Particle-Beam Chemical Processing for Microelectronics: Volume 101 (MRS Proceedings)

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Edited by Daniel J. Ehrlich , Gregg S. Higashi , Modest M. Oprysko
Published by Cambridge University Press, 2014
ISBN 10: 1107411041 ISBN 13: 9781107411043
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