Lithography in Microelectronics (Vol 8) (Proceedings of the Institute of General Physics Academy of the Sciences of the USSR) - Hardcover
Synopsis
Translated from the Russian edition (Nauka Publishing House, 1987). Results are given from an experimental investigation of the kinetic principles of etching of polymer resists in low-temperature plasma, the processes of nonresistive ion lithography, and modifications of electron resist films by medium energy ions. Significant attention is devoted
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Lithography in Microelectronics (Proceedings of the Institute of General Physics of the Academy of Sciences of the USSR) (Vol 8)
Published by
Nova Science Publishers, 1989
ISBN 10: 0941743306
ISBN 13: 9780941743303
Used
Hardcover
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Condition: Very Good. 207 pp., Hardcover, minor library markings else text clean & binding tight. - If you are reading this, this item is actually (physically) in our stock and ready for shipment once ordered. We are not bookjackers. Buyer is responsible for any additional duties, taxes, or fees required by recipient's country. Seller Inventory # ZB704673