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This volume presents a research update of silicon and non-silicon transient processing techniques, such as rapid thermal process, laser processes, flash evaporation and jet processes. It also covers process sensors, equipment issues and the manufacturer's perspective. Coverage includes: modelling, measurement and control of rapid thermal processing, rapid thermal annealing, issues in silicon processing, transient thermal processing in III-V semiconductor technology, multi-wavelength imaging pyrometer for non-contact temperature monitoring, real-time implementation of an adaptive control system for a three-zone RTP state.
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- PublisherThe Minerals, Metals & Materials Society
- Publication date1998
- ISBN 10 0873393317
- ISBN 13 9780873393317
- BindingPaperback
- Number of pages179
- EditorRavindra N.M., Singh R. K.
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Transient Thermal Processing Techniques in Electronic Materials: Proceedings of a Symposium Sponsored by the Thin Films & Interfaces Committee of the . and Photonic Materials Division (Empmd) of
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