Handbook of Microlithography, Micromachining, and Microfabrication: v.2 (IEE Materials & Devices S.) - Hardcover

Hardcover

ISBN 10: 0852969112 ISBN 13: 9780852969113

Publisher: Institution of Engineering and Technology, 1997

Synopsis

This volume concentrates on the process technology and device applications associated with micomachining and microfabrication. The handbook is intended primarily for industrial laboratories, universities and manufacturing facilities.

Edition details

• Publisher: Institution of Engineering and Technology
• Publication date: 1997
• Language: English
• ISBN 10: 0852969112
• ISBN 13: 9780852969113
• Binding: Hardcover
• Number of pages: 700
• Editor: Choudhury P.Rai-