Handbook of Microlithography, Micromachining and Microfabrication: v.1 (IEE Materials & Devices S.) - Hardcover

 
9780852969069: Handbook of Microlithography, Micromachining and Microfabrication: v.1 (IEE Materials & Devices S.)
Hardcover
ISBN 10: 0852969066 ISBN 13: 9780852969069
Publisher: Institution of Engineering and Technology, 1997

Synopsis

Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.

"synopsis" may belong to another edition of this title.

Publisher
Institution of Engineering and Technology
Publication date
1997
Language
English
ISBN 10 
0852969066
ISBN 13 
9780852969069
Binding
Hardcover
Number of pages
776
Editor
Choudhury P.Rai-

Other Popular Editions of the Same Title

9780819497864: Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1: Microlithography (Press Monographs)

Featured Edition

ISBN 10:  081949786X ISBN 13:  9780819497864
Publisher: SPIE Press, 1997
Softcover