Basic Vacuum Technology, - Hardcover

Chambers, A.

Hardcover

ISBN 10: 0852741286 ISBN 13: 9780852741283

Publisher: Taylor & Francis, 1989

Synopsis

The use of vacuum techniques is currently increasing to such an extent that they now find application in many areas of industrial development and production and academic research, as well as fulfilling an important teaching role in undergraduate laboratories. Basic Vacuum Technology addresses the need of undergraduate and postgraduate students, engineers and technicians for a concise and up-to-date introduction to this subject. Emphasising the underlying physics, this book provides all the information required by new users of vacuum systems. Its coverage is wide-ranging - from the behaviour of gases at low pressures, through methods of vacuum production and measurement, to system design and testing. Basic Vacuum Technology will be particularly useful for newcomers to the subject since it contains all the necessary background material for a full understanding of vacuum systems. It will also be of value to the growing number of industrial users of vacua, particularly in the microelectronics and semiconductor industries, and to researchers in surface science, thin film studies, electron microscopy, atomic and nuclear physics and solid state science.

About this title

Review

..." a very useful text which is an up to date introduction appropriate to new research students so that they can approach UHV equipmment with confidence." D K Ross, Director, Science Research Institute, University of Salford, UK" ... much useful information on gas behaviour and surface cleaning." Howard Tring, Manager, Technology Training, BOC Edwards, Wilmington, MA, USA very useful text which is an up to date introduction appropriate to new research students so that they can approach UHV equipmment with confidence." D K Ross, Director, Science Research Institute, University of Salford, UK" ... much useful information on gas behaviour and surface cleaning." Howard Tring, Manager, Technology Training, BOC Edwards, Wilmington, MA, USA

Synopsis

In March 1986 the Vacuum Group of the Institute of Physics held their first two-day training course in "Vacuum Technology" at the University of Strathclyde. The course was sponsored by thr British Vacuum Council and the lectures and seminars were given by the present authors. Since then the course has been presented on several other occasions and the authors have also given in-house courses to industrial and research establishments. From their experience they saw the need for a book which would be sufficiently broad in content to cover not only methods of production, measurement and system design and testing, but should also include the overall behaviour of gases at low pressures. This book is the end result, and should prove to be of interest to engineers, technicians and post-graduate workers who need to acquire expertise in vacuum techniques.

Edition details

• Publisher: Taylor & Francis
• Publication date: 1989
• Language: English
• ISBN 10: 0852741286
• ISBN 13: 9780852741283
• Binding: Hardcover
• Edition number: 1
• Number of pages: 180