Nanolithography and patterning techniques in microelectronics - Hardcover

Hardcover

ISBN 10: 0849334470 ISBN 13: 9780849334474

Publisher: CRC Press, 2005

Synopsis

Nanolithography and Patterning Techniques in Microelectronics examines the new range of techniques that have made it possible to develop complex patterns at the nanoscale and explores their industrial applications. This book considers ways of forming and modifying surfaces for patterning and provides information on specific patterning techniques such as soft lithography, ion beam patterning, use of nanostencils, photolithography, and inkjet printing. It also discusses prototyping and the manufacture of particular devices. With a distinguished team of contributors, this is an ideal reference for researchers and professionals using advanced polymers in such areas as microelectronics and biomedical devices.

About this title

From the Back Cover

Techniques such as surface patterning have facilitated the
emergence of advanced polymers with applications in areas such as
microelectronics. Surface patterning of polymers has conventionally been
undertaken by optical lithography. However, a new generation of
nanolithographic and patterning techniques has made it possible to develop
complex patterns at the nanoscale. Non-conventional lithography and
patterning summarises this new range of techniques and their industrial
applications.

A number of chapters look at ways of forming and modifying surfaces for
patterning. These are complemented by chapters on particular patterning
techniques such as soft lithography, ion beam patterning, the use of
nanostencils, photolithography and inkjet printing. The book also discusses
prototyping and the manufacture of particular devices.

With its distinguished international team of contributors, Non-conventional
lithography and patterning is a standard reference for both those
researching and using advanced polymers in such areas as microelectronics
and biomedical devices.

About the Author

Dr David Bucknall is an Associate Professor at the Georgia Institute of Technology. He holds a joint appointment in the School of Polymers, Textiles and Fiber Engineering and the School of Materials Science and Engineering.

Edition details

• Publisher: CRC Press
• Publication date: 2005
• Language: English
• ISBN 10: 0849334470
• ISBN 13: 9780849334474
• Binding: Hardcover
• Edition number: 1
• Number of pages: 410
• Editor: Bucknall David G.