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Polymeric Materials for Microelectronic Applications: Science and Technology: 579 (ACS Symposium Series) - Hardcover
Synopsis
Reports recent developments in polymer science and technology pertinent to microelectronics. Addresses such topics as photophysics and radiation physics and chemistry of polymers; photoresists, electron beam resists, and X-ray resists; insulating materials in microelectronics; photoresponsive materials; silicon-containing polymers; conducting polymers; and optoelectronic materials. Includes international contributions from both academia and industry.
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Polymeric Materials for Microelectronic Applications: Science and Technology (ACS Symposium Series, No. 579)
Published by
American Chemical Society, 1995
ISBN 10: 0841230552
ISBN 13: 9780841230552
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