Synopsis
Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.
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Introduction to Microlithography (ACS Professional Reference Book)
Published by
American Chemical Society (edition 2), 1994
ISBN 10: 0841228485
ISBN 13: 9780841228481
Used
Hardcover
Seller: BooksRun, Philadelphia, PA, U.S.A.
Seller rating 5 out of 5 stars
Hardcover. Condition: Very Good. 2. It's a well-cared-for item that has seen limited use. The item may show minor signs of wear. All the text is legible, with all pages included. It may have slight markings and/or highlighting. Seller Inventory # 0841228485-11-1
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Introduction to Microlithography (ACS Professional Reference Book)
Published by
American Chemical Society, 1994
ISBN 10: 0841228485
ISBN 13: 9780841228481
New
Hardcover
Seller: World of Books (was SecondSale), Montgomery, IL, U.S.A.
Seller rating 5 out of 5 stars
Condition: New. Seller Inventory # 00087956635
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Introduction to Microlithography (ACS Professional Reference Book)
Published by
American Chemical Society, 1994
ISBN 10: 0841228485
ISBN 13: 9780841228481
Used
Hardcover
Seller: HPB-Red, Dallas, TX, U.S.A.
Seller rating 5 out of 5 stars
Hardcover. Condition: Good. Connecting readers with great books since 1972! Used textbooks may not include companion materials such as access codes, etc. May have some wear or writing/highlighting. We ship orders daily and Customer Service is our top priority! Seller Inventory # S_448673762
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Introduction to Microlithography (ACS Professional Reference Book)
Published by
American Chemical Society, 1994
ISBN 10: 0841228485
ISBN 13: 9780841228481
Used
Hardcover
Seller: HPB-Emerald, Dallas, TX, U.S.A.
Seller rating 5 out of 5 stars
hardcover. Condition: Very Good. Connecting readers with great books since 1972! Used books may not include companion materials, and may have some shelf wear or limited writing. We ship orders daily and Customer Service is our top priority! Seller Inventory # S_468962750
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Intro Microlith 2ed Acspr C
Seller: ThriftBooks-Atlanta, AUSTELL, GA, U.S.A.
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Hardcover. Condition: Very Good. No Jacket. May have limited writing in cover pages. Pages are unmarked. ~ ThriftBooks: Read More, Spend Less. Seller Inventory # G0841228485I4N00
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Intro Microlith 2ed Acspr C
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Hardcover. Condition: Good. No Jacket. Pages can have notes/highlighting. Spine may show signs of wear. ~ ThriftBooks: Read More, Spend Less. Seller Inventory # G0841228485I3N00
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Intro Microlith 2ed Acspr C
Seller: ThriftBooks-Atlanta, AUSTELL, GA, U.S.A.
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Hardcover. Condition: Good. No Jacket. Pages can have notes/highlighting. Spine may show signs of wear. ~ ThriftBooks: Read More, Spend Less. Seller Inventory # G0841228485I3N00
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Intro Microlith 2ed Acspr C
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Hardcover. Condition: Very Good. No Jacket. May have limited writing in cover pages. Pages are unmarked. ~ ThriftBooks: Read More, Spend Less. Seller Inventory # G0841228485I4N00
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Introduction to Microlithography
Published by
American Chemical Society, Washington, DC, 1994
ISBN 10: 0841228485
ISBN 13: 9780841228481
Used
Hardcover
Seller: Xochi's Bookstore & Gallery, Truth or consequences, NM, U.S.A.
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Hardcover. Condition: Very Good. No Jacket. 2nd. 527pp.incl.index; HB blue w/white; some rub w/wear on edges; PONft.pastedwn.; clean,tight pgs. " . the physics of the lithographic process, organic resist materials, resist processing, and plasma etching." illus. Seller Inventory # 024349
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Introduction to Microlithography (ACS Professional Reference Book)
Published by
American Chemical Society, 1994
ISBN 10: 0841228485
ISBN 13: 9780841228481
Used
Hardcover
Seller: The Mighty Book, Portland, OR, U.S.A.
Seller rating 5 out of 5 stars
Hardcover. Condition: Very Good. 2nd Edition. Gently read 2nd edition, with clean text, two creased page corners. Light wear to the pictorial cover. Ready to ship. Seller Inventory # H205