Polymers for Microelectronics: Resists and Dielectrics: 537 (ACS Symposium Series) - Hardcover

 
9780841227217: Polymers for Microelectronics: Resists and Dielectrics: 537 (ACS Symposium Series)
Hardcover
ISBN 10: 0841227217 ISBN 13: 9780841227217
Publisher: American Chemical Society, 1994

Synopsis

Presents recent advances in chemically amplified resists for deep UV, electron beam, and X-ray advanced lithographic technologies. Discusses top surface imaging and dry development resists. Examines the fundamental chemistry of radiation-sensitive materials, including dielectric polymers for integrated circuits and interconnect systems. Valuable reading for polymer chemists, radiation chemists, and materials scientists.

"synopsis" may belong to another edition of this title.

Publisher
American Chemical Society
Publication date
1994
Language
English
ISBN 10 
0841227217
ISBN 13 
9780841227217
Binding
Hardcover
Number of pages
554
Editor
Thompson Larry F., Willson C. Grant, Tagawa Seiichi