Particle Control for Semiconductor Manufacturing - Hardcover

Donovan, R.P.

 
9780824782429: Particle Control for Semiconductor Manufacturing

Synopsis

There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In

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About the Author

R.P. Donovan

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