Field Guide to Optical Lithography - Softcover

SPIE Press

 
9780819462077: Field Guide to Optical Lithography

From the Back Cover

The aim of each SPIE Field Guide is to distill a major field of optical science or technology into a handy desk or briefcase reference that provides basic, essential information about optical principles, techniques, or phenomena.

Written for you - the practicing engineer or scientist - each field guide includes the key definitions, equations, illustrations, application examples, design considerations, methods, and tips that you need in the lab and in the field.

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