Items related to Advances In Resist Technology and Processing Xv

Advances In Resist Technology and Processing Xv - Softcover

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9780819427786: Advances In Resist Technology and Processing Xv
Softcover
ISBN 10: 0819427780 ISBN 13: 9780819427786
Publisher: SPIE Press, 1998

Synopsis

A review of advances in resist technology and processing. It contains 142 papers which cover areas such as ArF materials, DUV processing and Novolak-based processing.

"synopsis" may belong to another edition of this title.

Publisher
SPIE Press
Publication date
1998
Language
English
ISBN 10 
0819427780
ISBN 13 
9780819427786
Binding
Paperback
Number of pages
1500