Handbook of Microlithography, Micromachining and Microfabrication: Vol.1 (Handbook of Microlithography, Micromachining, and Microfabrication) (Press Monographs) - Hardcover
Synopsis
The dynamic field of lithography demands an authoritative handbook for process development and production and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
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Synopsis
This first of two volumes covers microlithography, focusing on applications of microlithography techniques in microelectronics manufacturing. Coverage includes optical lithography, electron beam lithography, deep-UV resist technology, X-ray lithography, photomask fabrication procedures and limitations, metrology methods in photolithography, optical
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Published by
Society of Photo-Optical Instrumentation Engineers (edition ), 1997
ISBN 10: 0819423785
ISBN 13: 9780819423788
Used
Hardcover
Seller: BooksRun, Philadelphia, PA, U.S.A.
Seller rating 5 out of 5 stars
Hardcover. Condition: Good. It's a preowned item in good condition and includes all the pages. It may have some general signs of wear and tear, such as markings, highlighting, slight damage to the cover, minimal wear to the binding, etc., but they will not affect the overall reading experience. Seller Inventory # 0819423785-11-1
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Published by
Society of Photo-Optical Instrumentation Engineers, 1997
ISBN 10: 0819423785
ISBN 13: 9780819423788
Used
Hardcover
Seller: Blue Vase Books, Interlochen, MI, U.S.A.
Seller rating 5 out of 5 stars
Condition: good. The item shows wear from consistent use, but it remains in good condition and works perfectly. All pages and cover are intact including the dust cover, if applicable . Spine may show signs of wear. Pages may include limited notes and highlighting. May NOT include discs, access code or other supplemental materials. Seller Inventory # BVV.0819423785.G
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Published by
Society of Photo-Optical Instrum, 1997
ISBN 10: 0819423785
ISBN 13: 9780819423788
Used
Hardcover
Seller: Booksavers of Virginia, Harrisonburg, VA, U.S.A.
Seller rating 5 out of 5 stars
hardcover. Condition: Good. Pages unmarked, binding tight. Minor wear and bumps to cover boards. No DJ. Your purchase benefits the world-wide relief efforts of Mennonite Central Committee. Seller Inventory # mon0000347967
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Published by
Society of Photo-Optical Instrumentation Engineers, 1997
ISBN 10: 0819423785
ISBN 13: 9780819423788
Used
Hardcover
Seller: Zubal-Books, Since 1961, Cleveland, OH, U.S.A.
Seller rating 5 out of 5 stars
Condition: Good. *Price HAS BEEN REDUCED by 10% until Monday, Dec. 1 (sale item)* 768 pp., hardcover, ex library, else text clean and binding tight. - If you are reading this, this item is actually (physically) in our stock and ready for shipment once ordered. We are not bookjackers. Buyer is responsible for any additional duties, taxes, or fees required by recipient's country. Seller Inventory # ZB1333054
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Published by
Society of Photo-Optical Instrumentation Engineers, 1997
ISBN 10: 0819423785
ISBN 13: 9780819423788
Used
Hardcover
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Hardcover. Condition: Fine. gently used ships lightning fast. Seller Inventory # ABE-1736976200338
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Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography
Published by
Society of Photo-Optical Instrumentation Engineers, 1997
ISBN 10: 0819423785
ISBN 13: 9780819423788
Used
Hardcover
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Condition: good. Befriedigend/Good: Durchschnittlich erhaltenes Buch bzw. Schutzumschlag mit Gebrauchsspuren, aber vollständigen Seiten. / Describes the average WORN book or dust jacket that has all the pages present. Seller Inventory # M00819423785-G
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Published by
Society of Photo-Optical Instrumentation Engineers, 1997
ISBN 10: 0819423785
ISBN 13: 9780819423788
Used
Hardcover
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Hardcover. Seller Inventory # Abebooks219465
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Published by
Brand: Society of Photo-Optical Instrumentation Engineers, 1997
ISBN 10: 0819423785
ISBN 13: 9780819423788
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Published by
Society of Photo-Optical Instrumentation Engineers, 1997
ISBN 10: 0819423785
ISBN 13: 9780819423788
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Hardcover
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Hardcover. Condition: New. In shrink wrap. Looks like an interesting title! Seller Inventory # Q-0819423785
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39) Harry J. Levinson; Mark A. McCord; Franco Cerrina; Robert D. Allen; John G. Skinner; Andrew R. Neureuther; Martin C. Peckerar; F. Keith Perkins; Michael J. Rooks and P. Rai-Choudhury
Published by
Society of Photo-Optical Instrumentation Engineers, 1997
ISBN 10: 0819423785
ISBN 13: 9780819423788
New
Hardcover
Seller: The Book Spot, Sioux Falls, MN, U.S.A.
Seller rating 5 out of 5 stars
Condition: New. (inventory#Shelf). Seller Inventory # EZ97705