A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade.
Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.
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"àcomprehensively covers state-of-the-art sputtering techniques and equipmentàthoroughly addresses all fundamental aspects." - Materials and Processing Report
A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research.
"About this title" may belong to another edition of this title.
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Microelectronics, superconductors. Hardcover, 304 pages. Condition: near fine, no jacket. [Please note a later edition was published] ISBN 0815512805. Seller Inventory # 41156
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Seller: Buchpark, Trebbin, Germany
Condition: Gut. Zustand: Gut - Gebrauchs- und Lagerspuren. Außen: verschmutzt, vergilbt. Innen: Seiten verschmutzt, Seiten vergilbt. Aus der Auflösung einer renommierten Bibliothek. Kann Stempel beinhalten. | Seiten: 316 | Sprache: Englisch | Produktart: Bücher. Seller Inventory # 1222032/203
Quantity: 1 available