Handbook of Sputter Deposition Technology: Principles, Technology and Applications (Materials Science and Process Technology Series) - Softcover

Wasa, Kiyotaka; Hayakawa, Shigeru

 
9780815512806: Handbook of Sputter Deposition Technology: Principles, Technology and Applications (Materials Science and Process Technology Series)

Synopsis

A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade.

Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.

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Review

"àcomprehensively covers state-of-the-art sputtering techniques and equipmentàthoroughly addresses all fundamental aspects." - Materials and Processing Report

Review

A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research.

"About this title" may belong to another edition of this title.

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ISBN 10:  0323510841 ISBN 13:  9780323510844
Publisher: William Andrew, 2018
Softcover