Handbook of Contamination Control in Microelectronics and Technology: Principles, Applications and Technology (Materials Science & Process Technology) (Materials Science and Process Technology Series) - Hardcover

Tolliver, Donald L.

Hardcover

ISBN 10: 0815511515 ISBN 13: 9780815511519

Publisher: William Andrew, 1988

Synopsis

This book introduces contamination control in a comprehensive manner. It covers the basics for the beginner, and delves in depth into the more critical issues of process engineering and circuit manufacturing for the more advanced reader. The reader will begin to see how the puzzle of contamination control comes together and to focus on the fundamentals required for excellence in modern semiconductor manufacturing.

What makes the area of contamination control unique is its ubiquitous nature, across all facets of semiconductor manufacturing. Clean room technology, well recognized as a fundamental requirement in modern day circuit manufacturing, barely scratches the surface in total contamination control. This handbook defines and describes most of the major categories in current contamination control technology.

About this title

Review

This book introduces contamination control in a comprehensive manner. It covers the basics for the beginner, and delves in depth into the more critical issues of process engineering and circuit manufacturing for the more advanced reader.

Review

"àshould be in the library of all microelectronics engineers and designers." - Microelectronics & Reliability

Edition details

• Publisher: William Andrew
• Publication date: 1988
• Language: English
• ISBN 10: 0815511515
• ISBN 13: 9780815511519
• Binding: Hardcover
• Number of pages: 509