Emerging Semiconductor Technology (Astm Special Technical Publication) - Hardcover

Hardcover

ISBN 10: 0803104596 ISBN 13: 9780803104594

Publisher: American Society for Testing & Materials, 1987

Synopsis

50 peer-reviewed papers cover: Epitaxial Technology Dielectrics and Junction Formation Techniques Plasma Technology and Other Fabrication Techniques Material Defects, Oxygen and Carbon in Silicon Yield Enhancement and Contamination Control Aspects Dopant Profiling Techniques and In-Process Measurement: and Fab Equipment: Automation and Reliability.

Edition details

• Publisher: American Society for Testing & Materials
• Publication date: 1987
• Language: English
• ISBN 10: 0803104596
• ISBN 13: 9780803104594
• Binding: Hardcover
• Number of pages: 725
• Editor: Gupta Dinesh C., Langer Paul H.