Items related to Fundamentals of Semiconductor Processing Technology

Fundamentals of Semiconductor Processing Technology - Hardcover

El-Kareh, Badih; Hutter, Lou N.

 
9780792395348: Fundamentals of Semiconductor Processing Technology
Hardcover
ISBN 10: 0792395344 ISBN 13: 9780792395348
Publisher: Springer, 1994

Synopsis

The drive toward new semiconductor technologies is intricately related to market demands for cheaper, smaller, faster, and more reliable circuits with lower power consumption. The development of new processing tools and technologies is aimed at optimizing one or more of these requirements. This goal can, however, only be achieved by a concerted effort between scientists, engineers, technicians, and operators in research, development, and manufac­ turing. It is therefore important that experts in specific disciplines, such as device and circuit design, understand the principle, capabil­ ities, and limitations of tools and processing technologies. It is also important that those working on specific unit processes, such as lithography or hot processes, be familiar with other unit processes used to manufacture the product. Several excellent books have been published on the subject of process technologies. These texts, however, cover subjects in too much detail, or do not cover topics important to modem tech­ nologies. This book is written with the need for a "bridge" between different disciplines in mind. It is intended to present to engineers and scientists those parts of modem processing technologies that are of greatest importance to the design and manufacture of semi­ conductor circuits. The material is presented with sufficient detail to understand and analyze interactions between processing and other semiconductor disciplines, such as design of devices and cir­ cuits, their electrical parameters, reliability, and yield.

"synopsis" may belong to another edition of this title.

About the Author

Dr. Badih El-Kareh is an independent consultant, retired IBM and Texas Instruments physicist. He has over 40 years' experience in semiconductor device design, process integration, and characterization. This includes the development of advanced CMOS and BiCMOS processes and devices for analog, memory, digital, and high-voltage applications. He has 30 years' experience in academic and industrial teaching and is author of a book on VLSI Silicon Devices, a book on Modern Semiconductor Processing Technologies, and a book on Silicon Devices and Process Integration. He authored and co-authored 35 papers and has 49 US patents issued. Dr. El-Kareh is a senior member of the IEEE. Lou Hutter has almost 35 years of experience in the semiconductor industry.  As Director of the Mixed-Signal Technology Development group at TI, he was responsible for all analog, mixed-signal, RF, and power technology development in the company, supporting every major business unit.  After retiring from TI in 2007, he became the General Manager of the Analog Foundry business unit at Dongbu HiTek, a S. Korean foundry, where he was a Senior VP.  He was elected a TI Fellow in 1995, holds 47 U.S. patents, and has co-authored over 30 papers.  His focus areas have been in high-performance analog CMOS, high-power BCD technology, power metallization, SiGe BiCMOS, technology road-mapping, and technology development methodology.

From the Back Cover

The drive toward new semiconductor technologies is intricately related to market demands for cheaper, smaller, faster, and more reliable circuits with lower power consumption. The development of new processing tools and technologies is aimed at optimizing one or more of these requirements. This goal can, however, only be achieved by a concerted effort between scientists, engineers, technicians, and operators in research, development, and manufac­ turing. It is therefore important that experts in specific disciplines, such as device and circuit design, understand the principle, capabil­ ities, and limitations of tools and processing technologies. It is also important that those working on specific unit processes, such as lithography or hot processes, be familiar with other unit processes used to manufacture the product. Several excellent books have been published on the subject of process technologies. These texts, however, cover subjects in too much detail, or do not cover topics important to modem tech­ nologies. This book is written with the need for a "bridge" between different disciplines in mind. It is intended to present to engineers and scientists those parts of modem processing technologies that are of greatest importance to the design and manufacture of semi­ conductor circuits. The material is presented with sufficient detail to understand and analyze interactions between processing and other semiconductor disciplines, such as design of devices and cir­ cuits, their electrical parameters, reliability, and yield.

"About this title" may belong to another edition of this title.

Publisher
Springer
Publication date
1994
Language
English
ISBN 10 
0792395344
ISBN 13 
9780792395348
Binding
Hardcover
Number of pages
602