Synopsis
Nearly 100 papers from four symposia consider such aspects as micro-manufacturing processes, applications of microfabrication to fluid mechanics, devices, tribology, material issues, actuators and actuation mechanisms, sensors, processes, tools, and computational methods. Specific topics include pressure and power generation during explosive vapori
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Micro-Electro-Mechanical Systems (MEMS) 1998: Micro-Manuacturing Processes in MEMS and Other Advanced Systems. Applications of Micro-Fabrication to Fluid Mechanics. Micro-Electro-Mechanical Systems. Computational Methods for Analysis, Design and Simulat
Published by
The American Society of Mechanical Engineers, 1998
ISBN 10: 079181596X
ISBN 13: 9780791815960
Used
Softcover
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