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Synopsis
This volume is devoted to consideration of the use of surface, thin film and interface characterization tools in support of silicon-based semiconductor processing. Each chapter treats a type of film used in silicon devices and discusses typical problems seen throughout that film's history, including characterization tools which are most effectively used in clarifying and solving those problems.
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Characterization in Silicon Processing
Published by
Saint Louis, Missouri, U.S.A.: Butterworth-Heinemann, 1993
ISBN 10: 0750691727
ISBN 13: 9780750691727
Used
Hardcover
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Hardcover. Condition: Very Good. Hardback in very good condition. Libary stamp on bottom of pages. Seller Inventory # 21838
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