Nanoscale Standards by Metrological AFM and Other Instruments (IOP ebooks) - Hardcover

Misumi, Ichiko

Hardcover

ISBN 10: 0750331895 ISBN 13: 9780750331890

Publisher: Institute of Physics Publishing, 2020

Synopsis

This book reviews nanometrological standards before proceeding to detail pitch, step height, line width, nanoparticle size, and surface roughness. Essential for users making quantitative nanoscale measurements, in a commercial or academic research setting, or involved in engineering nanometrology for quality control in industrial applications.

About this title

About the Author

Dr Misumi graduated with a degree in precision machinery engineering, from the University of Tokyo in 1996 and obtained her Doctor of Engineering from the University of Tokyo in 2004. She joined the National Research Laboratory of Metrology (NRLM) in 2000. In 2001, NRLM was renamed the National Metrology Institute of Japan (NMIJ). She received 'Outstanding Precision Measurement Paper Award 2005' from Measurement Science and Technology, Institute of Physics (IOP), and 'Highly Commended Paper Award 2007', again from Measurement Science and Technology, Institute of Physics (IOP). She also received 'Award for Science and Technology (Development Category), The Commendation for Science and Technology by the Minister of Education, Culture, Sports, Science and Technology' in 2011.

Edition details

• Publisher: Institute of Physics Publishing
• Publication date: 2020
• Language: English
• ISBN 10: 0750331895
• ISBN 13: 9780750331890
• Binding: Hardcover
• Number of pages: 92