Laser Chemical Processing for Microelectronics (Cambridge Studies in Modern Optics, Series Number 7) - Hardcover

 
9780521322546: Laser Chemical Processing for Microelectronics (Cambridge Studies in Modern Optics, Series Number 7)
Hardcover
ISBN 10: 0521322545 ISBN 13: 9780521322546
Publisher: Cambridge University Press, 1989

Synopsis

This book describes the application of laser processing techniques in the fabrication of semiconductor materials and devices for the microelectronics industry. It comprises a collection of reviews of interest to those involved with a semiconductor fabrication facility.

"synopsis" may belong to another edition of this title.

Publisher
Cambridge University Press
Publication date
1989
Language
English
ISBN 10 
0521322545
ISBN 13 
9780521322546
Binding
Hardcover
Number of pages
192
Editor
Ibbs K. G., Osgood Richard Magee