A User′s Guide to Vacuum Technology - Hardcover

O′Hanlon, John F.

Hardcover

ISBN 10: 0471812420 ISBN 13: 9780471812425

Publisher: Wiley–Blackwell, 1989

Synopsis

This book introduces the reader to the theory and practice of modern vacuum technology, with applications. It focuses on the understanding, operation and selection of equipment for vacuum processes used in semiconductor, optical and related technologies. This second edition has new information on components, lubrication, pump fluids and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system. The book will be of benefit to electrical and mechanical engineers and graduate students. The previous edition of this book was published in 1980.

About this title

Review

"...an excellent handbook for engineers, scientists, or anybody who uses vacuum systems on a regular basis." ( IEEE Circuits & Devices Magazine, May/June 2005)

"...clearly written with...many helpful hints...highly recommended." (MRS Bulletin, January 2005)

"This book sucks in a good way...the third edition will never get dusty on my bookshelf...although the text is certainly not coffee–table reading material, it will have a wide appeal...it is particularly valuable as a reference for those who work practically with vacuum technologies and a must–buy for those who design them." (JOM, February 26, 2004)

"...a fundamental understanding of modern vacuum technology and a practical user′s perspective of laboratory and industrial vacuum technology. This edition, while still providing core information in a very practical style...covers many new advances in the field...there are loads of graphs, data, and tables to provide practical and useful information to the vacuum user." (IEEE Electrical Insulation Magazine)

"...an excellent handbook for engineers, scientists, or anybody who uses vacuum systems on a regular basis." ( IEEE Circuits & Devices Magazine, May/June 2005)

"...clearly written with...many helpful hints...highly recommended." (MRS Bulletin, January 2005)

"This book...is particularly valuable as a reference for those who work practically with vacuum technologies and a must–buy for those who design them." (JOM, February 26, 2004)

From the Back Cover

The leading text in the field fully updated to reflect changes in vacuum technology

In the decade and a half since the publication of the Second Edition of A User’s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination–free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today’s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User’s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.

The Third Edition features significant additions, including:

• Updated coverage of all topics
• A discussion of SI units and their conversion
• Expanded coverage of gauges, pumps, materials, components, and systems
• A discussion of ultraclean vacuum systems now used routinely in high–volume production of semiconductor chips and related process–sensitive devices
• A review of rough pumping and crossover, including methods for prevention of aerosol formation

As with previous editions, the Third Edition is an important resource for both students and professionals in microelectronics, optics, thin–film coating, and other industries dependent on leading–edge applications of vacuum technology.

Edition details

• Publisher: Wiley–Blackwell
• Publication date: 1989
• Language: English
• ISBN 10: 0471812420
• ISBN 13: 9780471812425
• Binding: Hardcover
• Edition number: 2
• Number of pages: 512