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Science and Technology of Defects in Silicon: Symposium Proceedings (European Materials Research Aociety Symposia Proceedings S.) - Hardcover
Synopsis
This volume reviews recent developments in the materials science of silicon. The topics discussed range from the fundamental characterization of the physical properties to the assessment of materials for device applications, and include: crystal growth; process-induced defects; topography; hydrogenation of silicon; impurities; and complexes and interactions between impurities. In view of its key position within the conference scope, several papers examine process induced defects: defects due to ion implantation, silicidation and dry etching, with emphasis being placed on the device aspects. Special attention is also paid to recent developments in characterization techniques on epitaxially grown silicon, and silicon-on-insulators.
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- PublisherElsevier Science Ltd
- Publication date1990
- ISBN 10 0444886192
- ISBN 13 9780444886194
- BindingHardcover
- LanguageEnglish
- Number of pages518
- EditorAmmerlaan C. A. J., Chantre A., Wagner P.
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Defects in Silicon. European Materials Research Society Symposia Proceedings, Volume 9)
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Defects in Silicon: Proceedings of Symposium B on Science and Technology of Defects in Silicon of the 1989 E-Mrs Conference, Strasbourg, France, 30: . Society Symposia Proceedings, Band 9)
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Condition: very good. Gut/Very good: Buch bzw. Schutzumschlag mit wenigen Gebrauchsspuren an Einband, Schutzumschlag oder Seiten. / Describes a book or dust jacket that does show some signs of wear on either the binding, dust jacket or pages. Seller Inventory # M00444886192-V
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Defects in Silicon: Proceedings of Symposium B on Science and Technology of Defects in Silicon of the 1989 E-Mrs Conference, Strasbourg, Fra
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Hardcover. Condition: Très bon. Ancien livre de bibliothèque. Légères traces d'usure sur la couverture. Edition 1990. Ammareal reverse jusqu'à 15% du prix net de cet article à des organisations caritatives. ENGLISH DESCRIPTION Book Condition: Used, Very good. Former library book. Slight signs of wear on the cover. Edition 1990. Ammareal gives back up to 15% of this item's net price to charity organizations. Seller Inventory # D-625-148
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