Synopsis
This book introduces to non-experts several important processes of impurity doping in silicon and goes on to discuss the methods of determination of the concentration of dopants in silicon. The conventional method used is the discussion process, but, since it has been sufficiently covered in many texts, this work describes the double-diffusion method.
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Impurity doping processes in silicon (Materials processing, theory and practices)
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Impurity doping processes in silicon (Materials processing, theory and practices)
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