Integrated Processing for Micro- and Optoelectronics: Proceedings of Symposium D on Integrated Processing for Micro- and Optoelectronics of the 1993 ... Research Aociety Symposia Proceedings S.) - Hardcover

9780444819833: Integrated Processing for Micro- and Optoelectronics: Proceedings of Symposium D on Integrated Processing for Micro- and Optoelectronics of the 1993 ... Research Aociety Symposia Proceedings S.)

Hardcover

ISBN 10: 0444819835 ISBN 13: 9780444819833

Publisher: Elsevier Science Ltd, 1994

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These proceedings focus on the technology application driving forces for multichamber approaches to semiconductor process sequences, otherwise called cluster tools or integrated processing and present research results upon which these manufacturing technologies are built.

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Publisher: Elsevier Science Ltd
Publication date: 1994
Language: English
ISBN 10: 0444819835
ISBN 13: 9780444819833
Binding: Hardcover
Number of pages: 320
Editor: Nissim Yves I., Etc., Katz A., Rubloff G.W.

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Integrated Processing for Micro- And Optoelectronics: Proceedings of Symposium d on Integrated Processing for Micro- And Optoelectronics of the 1993 . Research Society Symposia Proceedings)

Symposium D On Beam Processing And Laser Chemistry; Katz, Avishay; Nissim, Yves I.

Published by North-Holland, 1994

ISBN 10: 0444819835 ISBN 13: 9780444819833

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