Items related to Introductory MEMS: Fabrication and Applications

Introductory MEMS: Fabrication and Applications - Softcover

Adams, Thomas M.; Layton, Richard A.

 
9780387560588: Introductory MEMS: Fabrication and Applications
Softcover
ISBN 10: 0387560580 ISBN 13: 9780387560588
Publisher: Springer, 2008

This specific ISBN edition is currently not available.

Synopsis

Fabrication.- The substrate and adding material to it.- Creating and transferring patterns#x2014;Photolithography.- Creating structures#x2014;Micromachining.- Solid mechanics.- Applications.- Thinking about modeling.- MEMS transducers#x2014;An overview of how they work.- Piezoresistive transducers.- Capacitive transducers.- Piezoelectric transducers.- Thermal transducers.- to microfluidics.- Laboratories.- Microfabrication laboratories.

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  • PublisherSpringer
  • Publication date2008
  • ISBN 10 0387560580
  • ISBN 13 9780387560588
  • BindingPaperback
  • LanguageEnglish
  • Number of pages462

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Other Popular Editions of the Same Title

9780387095103: Introductory MEMS: Fabrication and Applications

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ISBN 10:  0387095101 ISBN 13:  9780387095103
Publisher: Springer, 2009
Hardcover