Fabrication & Design of Resonant Microdevices - Softcover

Bahreyni, Behraad

Softcover

ISBN 10: 0323281605 ISBN 13: 9780323281607

Publisher: William Andrew, 2014

Synopsis

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices - important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry.

Edition details

• Publisher: William Andrew
• Publication date: 2014
• Language: English
• ISBN 10: 0323281605
• ISBN 13: 9780323281607
• Binding: Paperback
• Number of pages: 198