Items related to Semiconductor Lithography: Principles, Practices, and...

Semiconductor Lithography: Principles, Practices, and Materials (Microdevices: Physics & Fabrication Technologies) - Hardcover

Moreau, Wayne M.

 
9780306421853: Semiconductor Lithography: Principles, Practices, and Materials (Microdevices: Physics & Fabrication Technologies)
Hardcover
ISBN 10: 0306421852 ISBN 13: 9780306421853
Publisher: Kluwer Academic / Plenum Publishers, 1987

Synopsis

This volume brings together the work of many scientists and engineers over the last ten years and focuses on the basic resist materials, the lithographic processes, and the fundamental principles behind each lithographic process.

"synopsis" may belong to another edition of this title.

Publisher
Kluwer Academic / Plenum Publishers
Publication date
1987
Language
English
ISBN 10 
0306421852
ISBN 13 
9780306421853
Binding
Hardcover
Number of pages
952

Other Popular Editions of the Same Title

9781461282280: Semiconductor Lithography: Principles, Practices, and Materials (Microdevices)

Featured Edition

ISBN 10:  1461282284 ISBN 13:  9781461282280
Publisher: Springer, 2012
Softcover