Items related to Semiconductor Lithography: Principles, Practices, and...

Semiconductor Lithography: Principles, Practices, and Materials (Microdevices: Physics & Fabrication Technologies) - Hardcover

Moreau, Wayne M.

 
9780306421853: Semiconductor Lithography: Principles, Practices, and Materials (Microdevices: Physics & Fabrication Technologies)

Synopsis

This volume brings together the work of many scientists and engineers over the last ten years and focuses on the basic resist materials, the lithographic processes, and the fundamental principles behind each lithographic process.

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