Measurement Assurance for Dimensional Measurements on Integrated-Circuit Photomasks (Classic Reprint) - Hardcover

Carroll Croarkin

9780267072231: Measurement Assurance for Dimensional Measurements on Integrated-Circuit Photomasks (Classic Reprint)

Hardcover

ISBN 10: 0267072236 ISBN 13: 9780267072231

Publisher: Forgotten Books, 2018

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Excerpt from Measurement Assurance for Dimensional Measurements on Integrated-Circuit Photomasks

List OF worksheets Calculations for a line-spacing calibration curve. Calculations for a linewidth calibration curve Calculations for a pooled standard deviation Calculations for control of measurement process. Calculations for updating the calibration curve.

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