Items related to Ellipsometry in the Measurement of Surfaces and Thin...

Ellipsometry in the Measurement of Surfaces and Thin Films: Symposium Proceedings, Washington 1963; Symposium Held September 5-6, 1963, at the ... Standards, Washington, D. C (Classic Reprint) - Hardcover

E. Passaglia

 
9780266786931: Ellipsometry in the Measurement of Surfaces and Thin Films: Symposium Proceedings, Washington 1963; Symposium Held September 5-6, 1963, at the ... Standards, Washington, D. C (Classic Reprint)

Synopsis

Excerpt from Ellipsometry in the Measurement of Surfaces and Thin Films: Symposium Proceedings, Washington 1963; Symposium Held September 5-6, 1963, at the National Bureau of Standards, Washington, D. C

Although the theory and equations of Drude are exact, the exact equations are cumbersome in form. 'they cannot be solved in closed form for the desired quantities (refractive index and thickness of film) in terms of the measured change in state of polarization, as represented by tan ill, the ratio of the magnitude of the reflection coefficient for light polarized in the plane of incidence to that polarized normal to the plane of incidence, and A, the relative phase difference for these two polarizations. Thus trial-and-error and iteration meth ods must be used, and before the availability of electronic computers the routine application of the exact equations was almost impossible. Thus Drude and many subsequent workers used only the first linear terms in the expansion of the equations relating tangb and A to refrac tive index and thickness, and it is these approximate equations which are (unfortunately) often referred to as the Drude equations. This limited the application of the Drude theory to films which are very thin in comparison to the wavelength of light. However, With modern electronic computers the use of the exact equations is routine, once the initial programming is complete. Most workers have some kind of computational facilities, and programs have been described by Archer [2] and mccrackin et al.

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