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Introduction to Microelectronic Fabrication: Volume 5 (Modular Series on Solid State Devices) - Softcover
Synopsis
For courses in Theory and Fabrication of Integrated Circuits.
The author's goal in writing this text was to present a concise survey of the most up-to-date techniques in the field. It is devoted exclusively to processing, and is highlighted by careful explanations, clear, simple language, and numerous fully-solved example problems. This work assumes a minimal knowledge of integrated circuits and of terminal behavior of electronic components such as resistors, diodes, and MOS and bipolar transistors.
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Introduction to Microelectronic Fabrication, Second Edition, by Richard C. Jaeger, is a concise survey of the most up-to-date techniques in the field. It is devoted exclusively to processing and is highlighted by careful explanations, clean, simple language, and numerous fully solved example problems.
The second edition includes an entirely new chapter on MEMS, as well as substantial modifications to the chapters on MOS and bipolar process integration. Also included is new or expanded coverage of lithography and exposure systems, trench isolation, chemical mechanical polishing, shallow junctions, transient enhanced diffusion, copper Damascene processes and process simulation.
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- PublisherPearson
- Publication date2001
- ISBN 10 0201444941
- ISBN 13 9780201444940
- BindingPaperback
- LanguageEnglish
- Edition number2
- Number of pages336
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Introduction to Microelectronic Fabrication: Volume 5 (Modular Series on Solid State Devices)
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