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Synopsis
This handbook describes the applications of microscopy to semiconductor failure analysis, and should be a useful practical guide for all those working in the field. The basic principles of each type of microscopy are explained, and each is illustrated with case histories and micrographs of many failure mechanisms.
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Synopsis
This handbook describes the applications of microscopy to semiconductor failure analysis, and should be a useful practical guide for all those working in the field. The basic principles of each type of microscopy are explained, and each is illustrated with case histories and micrographs of many failure mechanisms.
"About this title" may belong to another edition of this title.
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The Role of Microscopy in Semiconductor Failure Analysis
Published by
Oxford University Press, Incorporated, 1992
ISBN 10: 0198564325
ISBN 13: 9780198564324
Used
Softcover
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