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PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing (Volume 26) (Thin Films, Volume 26) - Hardcover

 
9780125330268: PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing (Volume 26) (Thin Films, Volume 26)

Synopsis

Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems.
In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films.

This volume, part of the Thin Films Series, has been wholly written by two authors instead of showcasing several edited manuscripts.

"synopsis" may belong to another edition of this title.

About the Author

Ronald A. Powell. Palo Alto, California. Novellus Systems, Inc., Palo Alto California - Stephen M. Rossnagel. Yorktown Heights, New York. IBM Corporation, T.J. Watson Research Center, Yorktown Heights, New York

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Stephen M. Rossnagel, Ronald Powell et Abraham Ulman
Published by Academic Press Inc, 1999
ISBN 10: 012533026X ISBN 13: 9780125330268
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Hardcover. Condition: Bon. Ancien livre de bibliothèque. Légères traces d'usure sur la couverture. Salissures sur la tranche. Edition 1999. Tome 26. Ammareal reverse jusqu'à 15% du prix net de cet article à des organisations caritatives. ENGLISH DESCRIPTION Book Condition: Used, Good. Former library book. Slight signs of wear on the cover. Stains on the edge. Edition 1999. Volume 26. Ammareal gives back up to 15% of this item's net price to charity organizations. Seller Inventory # D-596-560

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ISBN 10: 012533026X ISBN 13: 9780125330268
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Buch. Condition: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems.In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films.This volume, part of the Thin Films Series, has been wholly written by two authors instead of showcasing several edited manuscripts. Englisch. Seller Inventory # 9780125330268

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Buch. Condition: Neu. nach der Bestellung gedruckt Neuware - Printed after ordering - Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems.In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films.This volume, part of the Thin Films Series, has been wholly written by two authors instead of showcasing several edited manuscripts. Seller Inventory # 9780125330268

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