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PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing (Volume 26) (Thin Films, Volume 26) - Hardcover
Synopsis
Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems.
In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films.
This volume, part of the Thin Films Series, has been wholly written by two authors instead of showcasing several edited manuscripts.
"synopsis" may belong to another edition of this title.
About the Author
Ronald A. Powell. Palo Alto, California. Novellus Systems, Inc., Palo Alto California - Stephen M. Rossnagel. Yorktown Heights, New York. IBM Corporation, T.J. Watson Research Center, Yorktown Heights, New York
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PVD for Microelectronics: Sputter Desposition to Semiconductor Ma: PVD for Microelectronics Vol 26 (Physics of Thin Films)
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Academic Press 1998-10-29, 1998
ISBN 10: 012533026X
ISBN 13: 9780125330268
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PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing: 1ed
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PVD for Microelectronics, Vol. 26
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PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing: Volume 26
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PVD for Microelectronics: Sputter Desposition to Semiconductor Ma: PVD for Microelectronics Vol 26 (Physics of Thin Films)
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PVD for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing (Thin Films) (Volume 26)
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PVD for Microelectronics, Vol. 26
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PVD for Microelectronics, Vol. 26
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PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing: Volume 26
Published by
Elsevier Science Publishing Co Inc, 1999
ISBN 10: 012533026X
ISBN 13: 9780125330268
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PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing
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Elsevier Science & Technology, Academic Press, 1999
ISBN 10: 012533026X
ISBN 13: 9780125330268
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Buch. Condition: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems.In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films.This volume, part of the Thin Films Series, has been wholly written by two authors instead of showcasing several edited manuscripts. Englisch. Seller Inventory # 9780125330268