PVD for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing (Thin Films)

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9780125330268: PVD for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing (Thin Films)

Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems.
In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films.

This volume, part of the Thin Films Series, has been wholly written by two authors instead of showcasing several edited manuscripts.

"synopsis" may belong to another edition of this title.

About the Author:

Ronald A. Powell. Palo Alto, California. Novellus Systems, Inc., Palo Alto California - Stephen M. Rossnagel. Yorktown Heights, New York. IBM Corporation, T.J. Watson Research Center, Yorktown Heights, New York

"About this title" may belong to another edition of this title.

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Ronald A. Powell; Stephen Rossnagel
Published by Elsevier Science Publishing Co Inc, United States (1998)
ISBN 10: 012533026X ISBN 13: 9780125330268
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Book Description Elsevier Science Publishing Co Inc, United States, 1998. Hardback. Book Condition: New. Language: English . This book usually ship within 10-15 business days and we will endeavor to dispatch orders quicker than this where possible. Brand New Book. Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems. In order to be able to reflect the development of today s science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films. This volume, part of the Thin Films Series, has been wholly written by two authors instead of showcasing several edited manuscripts. Bookseller Inventory # EOD9780125330268

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ROSSNAGEL, STEPHEN; POWELL, RONALD; ULMAN, ABRAHAM
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Book Description Academic Press, 1998. Hardback. Book Condition: NEW. 9780125330268 This listing is a new book, a title currently in-print which we order directly and immediately from the publisher. Bookseller Inventory # HTANDREE01037768

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ROSSNAGEL, STEPHEN; POWELL, RONALD; ULMAN, ABRAHAM
Published by Academic Press (1998)
ISBN 10: 012533026X ISBN 13: 9780125330268
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Book Description Academic Press, 1998. Hardback. Book Condition: NEW. 9780125330268 This listing is a new book, a title currently in-print which we order directly and immediately from the publisher. Bookseller Inventory # HTANDREE01198949

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Ronald A. Powell, Stephen Rossnagel
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