Interlayer Dielectrics for Semiconductor Technologies: 1 - Hardcover

Hardcover

ISBN 10: 0125112211 ISBN 13: 9780125112215

Publisher: Academic Press, 2003

Synopsis

Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges.

Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package.

* Brings together for the FIRST time the science and technology of interlayer deilectrics materials, in one volume
* written by renowned experts in the field
* Provides an up-to-date starting point in this young research field.

About this title

About the Author

By Shyam P Muraka

Edition details

• Publisher: Academic Press
• Publication date: 2003
• Language: English
• ISBN 10: 0125112211
• ISBN 13: 9780125112215
• Binding: Hardcover
• Number of pages: 464
• Editor: Muraka Shyam P, Eizenberg Moshe, Sinha Ashok K