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Vsli Electronics Microstructure Science: Lithography for Vlsi: 16 (V L S I ELECTRONICS) - Hardcover

 
9780122341168: Vsli Electronics Microstructure Science: Lithography for Vlsi: 16 (V L S I ELECTRONICS)
Hardcover
ISBN 10: 0122341163 ISBN 13: 9780122341168
Publisher: Academic Press Inc, 1987
Publisher
Academic Press Inc
Publication date
1987
Language
English
ISBN 10 
0122341163
ISBN 13 
9780122341168
Binding
Hardcover
Number of pages
361
Editor
Einspruch Norman G., Watts R.K.

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9780122341168: Vsli Electronics Microstructure Science: Lithography for Vlsi: 16 (V L S I ELECTRONICS)
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9781483204390: Lithography for VLSI: VLSI Electronics Microstructure Science, Vol. 16

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ISBN 10:  1483204391 ISBN 13:  9781483204390
Publisher: Academic Press, 2014
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Einspruch, Norman G.
Published by Academic Pr, 1987
ISBN 10: 0122341163 ISBN 13: 9780122341168
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