Plasma Processing for VLSI (v. 8) (Very Large Scale Integration Electronics) - Hardcover

 
9780122341083: Plasma Processing for VLSI (v. 8) (Very Large Scale Integration Electronics)

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9781483204321: Plasma Processing for VLSI: VLSI Electronics Microstructure Science, Vol. 8

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ISBN 10:  1483204324 ISBN 13:  9781483204321
Publisher: Academic Press, 2014
Softcover