Materials Science in Microelectronics I: The Relationships Between Thin Film Processing and Structure: 1 - Hardcover

Machlin, Eugene

Hardcover

ISBN 10: 008044640X ISBN 13: 9780080446400

Publisher: Elsevier Science, 2005

Synopsis

Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.The first volume of Materials Science in Microelectronics focuses on the first relationship – that between processing and the structure of the thin-film. The state of the thin film’s surface during the period that one monolayer exists - before being buried in the next layer – determines the ultimate structure of the thin film, and thus its properties. This volume takes into consideration the following potential influencing factors: crystal defects, void structure, grain structure, interface structure in epitaxial films, the structure of amorphous films, and reaction-induced structure.An ideal text or reference work for students and researchers in material science, who need to learn the basics of thin films.

About this title

Product Description

Materials Science In Microelectronics I, 2/E
Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.The first volume of Materials Science in Microelectronics focuses on the first relationship —

Edition details

• Publisher: Elsevier Science
• Publication date: 2005
• Language: English
• ISBN 10: 008044640X
• ISBN 13: 9780080446400
• Binding: Hardcover
• Edition number: 2
• Number of pages: 270