This is a superb state-of-the-art collection of contributed readings, by nationally recognized authorities in VLSI technology. The emphasis of this text is on fabrication.
"synopsis" may belong to another edition of this title.
- Whole chapter concerned with clean room engineering, or dust free environments.
- Both a text and a reference, as chapter material written by experts, but still contains worked examples, homework problems and illustrations.
- Authors/Editors are ULSI pioneers with extensive professional and academic experience.
"About this title" may belong to another edition of this title.
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