Very Large Scale Integration Technology - Softcover

Sze, Simon M.

Softcover

ISBN 10: 007066594X ISBN 13: 9780070665941

Publisher: McGraw-Hill Inc.,US, 1984

Synopsis

The first textbook to be published for this subject area, this text is aimed at senior level and graduate courses in ULSI technology. This text follows the tradition of Sze's highly successful pioneering text on VLSI technology, and is updated with the latest advances in the field of microelectronic chip fabrication. Since computer chips are foundations of modern electronics, these topics are essential for the next generation of USLI technologies, allowing more transistors to be packaged on a single chip. Contributing to each chapter are industry experts, specializing in topics such as epitaxy with low temperature processes, rapid thermal processes, low damage plasma reactive ion etching, fine line lithography, cleaning technology, clean room technology, packing and reliability. As both editors and authors, Chang and Sze have contributed both academic expertise, as well as editorial expertise, to create a cohesive and user-friendly text out of each state-of-the-art subject area.

About this title

From the Publisher

- Whole chapter concerned with clean room engineering, or dust free environments.
- Both a text and a reference, as chapter material written by experts, but still contains worked examples, homework problems and illustrations.
- Authors/Editors are ULSI pioneers with extensive professional and academic experience.

Edition details

• Publisher: McGraw-Hill Inc.,US
• Publication date: 1984
• Language: English
• ISBN 10: 007066594X
• ISBN 13: 9780070665941
• Binding: Paperback
• Number of pages: 640