Synopsis
As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentation, predictions, specifications, and industrial applications. Also included are appendices that review the basics of wave propagation and Kirchhoff diffraction. Whether you're an optical engineer currently investigating roughness-induced haze in the semiconductor industry, or just entering the field of scatter metrology, this text will be invaluable. Contents: - Introduction to Light Scatter- Surface Roughness- Scatter Calculations and Diffraction Theory- Calculation of Smooth-Surface Statistics from the BRDF- Polarization of Scattered Light- Scatter Measurements and Instrumentation- Scatter Predictions- Detection of Discrete Surface and Subsurface Defects- Industrial Applications- Scatter Specifications- Review of Electromagnetic Wave Propogation- Kirchhoff Diffraction from Sinusoidal Gratings
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Optical Scattering: Measurement and Analysis
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McGraw-Hill, Inc, New York, 1990
ISBN 10: 0070618143
ISBN 13: 9780070618145
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Hard Cover. Condition: Very Good -. No Jacket. First Edition. 235 x 160mm. pp. 238. English text. A detailed volume on issues relating to optical scattering including practical advice on measuring and predicting. Bound in original red and blue boards. Library marks to first few pages and base of spine, otherwise clean. Binding strong. No underlining. Ex-Library. Seller Inventory # 020952
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Optical Scattering: Measurement and Analysis (Optical and Electro-Optical Engineering Series)
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