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Fundamentals of Microfabrication

Marc Madou

Published by Taylor & Francis Ltd. Jul 2011, 2011
ISBN 10: 0849331803 / ISBN 13: 9780849331800
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Bibliographic Details

Title: Fundamentals of Microfabrication

Publisher: Taylor & Francis Ltd. Jul 2011

Publication Date: 2011

Binding: Buch

Book Condition: Neu


Neuware - Updated and revised, this perennial bestseller continues to provide the most complete MEMS and NEMS reference currently available. Discussing a variety of approaches, it offers background and comprehensive coverage on materials, processes, and manufacturing options. Now in its third edition, Fundamentals of Microfabrication includes recent developments in design packages, DNA and protein array, and fluidics. It also includes a section on nanotechnology applications and a chapter on nanomachining. This seminal reference also serves as a cogent instructional text, providing both classroom and self-learners with worked-out example problems, as well as reinforcing questions with answers. 752 pp. Englisch. Bookseller Inventory # 9780849331800

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"? the alpha and omega textbook of micro and nanofabrication and technology. ? Madou?s explanations often provide new perspectives to those who are more experienced. ? this feat of compressing a half century of science and engineering into one set of books makes them useful for years to come. The volumes can easily and aptly serve as course resources for students or as reference books for professionals. Summing Up: Recommended."
?CHOICE Magazine

"? offers the widest and yet the most detailed coverage of all essential and fundamental aspects of microfabrication and nanotechnology. The author has done an excellent and remarkable job in synthesizing such diverse material under a single umbrella."
?Suman Chakraborty, IIT Kharagpur, India

"Once again, Professor Madou has made an incredible contribution to the MEMS/NEMS global community in writing this series of books."
?Nico de Rooij, Director, Institute of Microengineering, EPFL, Switzerland

"? [the new three-volume format] has the potential to become a 'classic' just like the one-volume predecessor? easy to read, and I found some concepts explained in ways I hadn?t heard before? Very ambitious, very informative, very good for teaching!"
?Jorg P. Kutter, Technical University of Denmark

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