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Book Description paperback. Condition: New. Language:Chinese.Pages Number : 192 Publisher: Beijing Aerospace University Press Pub. Date :2003-03. comprehensive book on the current published a large number of micro-electromechanical systems (MEMS) technology literature and our research results in recent years. focuses on today s micro- electromechanical system content. application and development. Including the composition of micro-electromechanical systems and applications. MEMS functional materials. micro-manufacturing technology. mic. Seller Inventory # J52796