Items related to Principles of Lithography: v. PM97 (SPIE P.)
The ability to pack large numbers of individual transistors in a small area of silicon has enabled the functionality of modern microelectronics, specifically integrated circuits. This work focuses on photolithography - the method used for patterning nearly all integrated circuits fabricated at present, in which optical methods are used to transfer circuit patterns from master images, called masks or reticles, to silicon wafers. This work can serve as an introduction to the science of microlithography for someone who is unfamiliar with the subject. The reader is expected to have a foundation in basic physics, chemistry, and elementary calculus. The text covers a number of advanced subjects and may be useful to experienced lithographers who seek a better understanding of topics outside their areas of expertise. #Conoverview Of Lithography; Optical Pattern Formation; Photoresist; Modelling And Thin Film Effects; Wafer Steppers; Overlay; Masks And Reticles; Overcoming The Diffraction Limit; Metrology; The Limits Of Optical Lithography; Lithography Costs; Alternative Lithography Techniques. Appendix: Coherence.
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- PublisherSPIE Press
- Publication date2001
- ISBN 10 0819440450
- ISBN 13 9780819440457
- BindingHardcover
- Number of pages410
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Principles of Lithography (SPIE PRESS Monograph Vol. PM97)
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Society of Photo Optical
(2001)
ISBN 10: 0819440450
ISBN 13: 9780819440457
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Principles of Lithography
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SPIE-International Society for Optical Engine
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ISBN 10: 0819440450
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Principles of Lithography (SPIE PRESS Monograph Vol. PM97)
Published by
Society of Photo Optical
(2001)
ISBN 10: 0819440450
ISBN 13: 9780819440457
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Hardcover
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Book Description Condition: Good. Good; Hardcover; Covers are still glossy, but with a number of small dings and scratches; Small wrinkle to the right edge of about 20 pages, otherwise the endpapers and all text pages are clean and unmarked; The binding is excellent with a straight spine; This book will be shipped in a sturdy cardboard box with foam padding; Medium-Large Format (Quatro, 9.75" - 10.75" tall); 1.9 lbs; Light blue-green covers with title in white lettering; 2001, Society of Photo Optical; 410 pages; "Principles of Lithography (SPIE PRESS Monograph Vol. PM97)," by Harry J. Levinson. Seller Inventory # SKU-0672AJ01803303
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Principles of Lithography (SPIE PRESS Monograph Vol. PM97)
Published by
Society of Photo Optical
(2001)
ISBN 10: 0819440450
ISBN 13: 9780819440457
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Hardcover
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Book Description Condition: Good. Book is in Used-Good condition. Pages and cover are clean and intact. Used items may not include supplementary materials such as CDs or access codes. May show signs of minor shelf wear and contain limited notes and highlighting. 1.88. Seller Inventory # 0819440450-2-4
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Principles of Lithography (SPIE PRESS Monograph Vol. PM97)
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Society of Photo Optical
(2001)
ISBN 10: 0819440450
ISBN 13: 9780819440457
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Hardcover
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Book Description Condition: Very Good. Book is in Used-VeryGood condition. Pages and cover are clean and intact. Used items may not include supplementary materials such as CDs or access codes. May show signs of minor shelf wear and contain very limited notes and highlighting. 1.88. Seller Inventory # 0819440450-2-3
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Principles of Lithography (SPIE PRESS Monograph Vol. PM97)
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(2001)
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ISBN 13: 9780819440457
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Principles of Lithography (SPIE PRESS Monograph Vol. PM97)
Published by
Society of Photo Optical
(2001)
ISBN 10: 0819440450
ISBN 13: 9780819440457
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Book Description Condition: Fair. Acceptable/Fair condition. Book is worn, but the pages are complete, and the text is legible. Has wear to binding and pages, may be ex-library. 1.88. Seller Inventory # 353-0819440450-acp
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