Microfabrication for Industrial Applications - Hardcover

Regina Luttge

9780815515821: Microfabrication for Industrial Applications

Hardcover

ISBN 10: 0815515820 ISBN 13: 9780815515821

Publisher: William Andrew, 2011

Microfabrication for Industrial Applications focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices.

Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects.

Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc.

Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments
Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro
Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs)
Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT)
Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling

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Review:

Addresses industrial nanofabrication issues that are usually avoided . . . regulatory, safety, health, environmental!

Synopsis:

Currently available books on micro- and nanofabrication, MEMS and related topics fall short in discussing industrial application and large-scale manufacturing. The transfer of fabrication concepts from laboratory to factory is often avoided; process tolerance, yield, robustness, and process costs are largely irrelevant in academic research, but essential for industrial development. This book, however, explains micro- and nanofabrication methods from an industrial perspective. Background theory is provided only to better illustrate fabrication process characteristics and operation of micro- and nanostructured devices for industrially relevant applications.Here engineers and students alike will find the information necessary to correctly evaluate the potential value of currently available and near-future manufacturing processes for miniaturized systems in an industrial environment. Both authors have a background in academia and in high-tech industrial environments, and have been involved in micro- and nanomanufacturing developments for over a decade. The lessons that they learned about technology transfer from laboratory to fabrication is collected here for the first time.

Other fabrication topics addressed include regulatory, safety and health, and environmental issues for specific and illustrative application cases; what specific micro- and nanostructures can be manufactured; what dimension precision can be achieved; and how to manufacture large volumes of micro- and nanostructures (including machines, materials and processing costs, and costs of machinery ownership).

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