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Ion Implantation Technology: 18th International Conference on Ion Implantation Technology Iit 2010: 1321 (AIP Conference Proceedings / Materials Physics and Applications) - Hardcover

 
9780735408760: Ion Implantation Technology: 18th International Conference on Ion Implantation Technology Iit 2010: 1321 (AIP Conference Proceedings / Materials Physics and Applications)
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ISBN 10: 0735408769 ISBN 13: 9780735408760
Publisher: American Institute of Physics, 2011
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The proceedings of 18th International conference on Ion Implantation Technology (IIT2010) covers all aspect of ion implantation, from the fundamentals of ion-solid interactions to industrial applications of the latest implantation machines and device manufacturing.

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