For courses in Semiconductor Manufacturing Technology, IC Fabrication Technology, and Devices: Conventional Flow.
This up-to-date text on semiconductor manufacturing processes takes into consideration the rapid development of the industry's technology. It thoroughly describes the complicated and new IC chip fabrication processes in detail—with minimum mathematics, physics, and chemistry. Advanced technologies are covered along with older ones to assist students in understanding the development processes from a historic point of view.
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This book is written for technology students taking their first course in semiconductor manufacturing. It contains comprehensive and up-to-date information on this fast-changing industry. The text provides excellent descriptions of semiconductors, advanced manufacturing technologies, and plasma in integrated circuit (IC) processes. It focuses on the newest IC fabrication technologies and also describes older technologies to help the reader understand the development from an historical perspective. The material covered in the text is very close to real fabrication situations.
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