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Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications (Woodhead Publishing Series in Electronic and Optical Materials) - Softcover
Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions.
Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems.
Smart sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions.
Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems.
Smart sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions.
- Outlines industrial applications for smart sensors and smart MEMS
- Covers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to detect radiation and measure temperature
- Covers smart MEMS including power MEMS, radio frequency MEMS, optical MEMS, inertial MEMS, and microreaction chambers
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About the Author:
Stoyan Nihtianov (M’93-SM’98) received his M.Sc. and Ph.D. degrees in electronics from the Technical University in Sofia, Bulgaria in 1980 and 1987. From 1987 till 1995 he was part of the Dept. of Electronics, Technical University - Sofia, where he was an associate professor involved in research and teaching on analogue circuits and smart sensor systems.
Dr. Nihtianov is a member of the technical program committees of: International Conference on Industrial Technology (ICIT), International Symposium on Industrial Electronics (ISIE), International conference “Electronics (Bulgaria). He is an AdCom member and serves as a chair of the technical committee on MEMS@Nanotechnology of the Industrial Electronics society. He is also an associate editor of the IEEE Sensors Journal, and serves as an officer “Industrial relations and conferences of the BeNeLux section of IEEE.
Dr. Nihtianov is a member of the technical program committees of: International Conference on Industrial Technology (ICIT), International Symposium on Industrial Electronics (ISIE), International conference “Electronics (Bulgaria). He is an AdCom member and serves as a chair of the technical committee on MEMS@Nanotechnology of the Industrial Electronics society. He is also an associate editor of the IEEE Sensors Journal, and serves as an officer “Industrial relations and conferences of the BeNeLux section of IEEE.
"About this title" may belong to another edition of this title.
- PublisherWoodhead Publishing
- Publication date2018
- ISBN 10 0081013965
- ISBN 13 9780081013960
- BindingPaperback
- Edition number1
- Number of pages560
- EditorNihtianov S, Luque A.
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