Gate Dielectric Integrity: Material, Process and Tool Qualification: Material, Process and Tool Qualification (Astm Special Technical Publication) - Softcover

9780803126152: Gate Dielectric Integrity: Material, Process and Tool Qualification: Material, Process and Tool Qualification (Astm Special Technical Publication)

Softcover

ISBN 10: 0803126158 ISBN 13: 9780803126152

Publisher: American Society for Testing & Materials, 2000

Contains papers from a January 1999 conference held in San Jose, California, describing concepts and metrology of Gate Dielectric Integrity (GDI) and discussing its applications for material and device processes and tool qualification. Topics include methods, protocols, and reliability assessment as related to dielectric integrity. Papers are organized in sections on concepts, thin gate dielectrics, characterization and applications, and standardization. There is also a section summarizing panel discussions. Gupta is affiliated with Mitsubishi Silicon America. Brown is affiliated with Texas Instruments Inc. Annotation c. Book News, Inc., Portland, OR (booknews.com)

"synopsis" may belong to another edition of this title.

Synopsis:

Thirteen papers provide the latest concepts and metrology of the Gate Dielectric Integrity (GDI) and its applications for the material and device process and tool qualification. The wide variety of topics covered includes: concepts, methods, protocols and reliability, and assessment is related to dielectric integrity. The characterization of thin dielectrics, various GDI measurement techniques, and discussion of important effects on the characterization of GDI is also included. Until now, such information has never been available in a single book on GDI. This publication will benefit process engineers, lab technologists, quality and reliability engineers, silicon material scientists, materials characterization analysts, research scholars and device engineers.

"About this title" may belong to another edition of this title.